This title features cutting-edge design for manufacturability techniques for nanoscale CMOS VLSI circuits. Covering defect analysis, equipment, and lithographic control evaluations, this book offers a holistic approach for VLSI circuit designers to evaluate and analyze IC circuit designs from the manufacturability point of view.
This practical guide is ideal for design engineers, managers, students, and academics interested in understanding the sources of semiconductor chip failures and how these problems can be mitigated through design.Spis treści:Chapter 1.
Introduction; Chapter 2. Semiconductor Manufacturing; Chapter 3. Process and Device Variability: Analysis and Modeling; Chapter 4. Manufacturing-Aware Physical Design Closure; Chapter 5. Metrology, Manufacturing Defects, and Defect Extraction; Chapter 6.
Defect Impact Modeling and Yield Improvement Techniques; Chapter 7. Physical Design and Reliability; Chapter 8. Design for Manufacturability: Tools and Methodologies